The semiconductor industry is a high-tech, high-value-added sector that has surpassed traditional industries like steel and automobiles. Semiconductors are the core of many industrial equipment and are widely used in computers, consumer electronics, network communications, and automotive electronics. In the semiconductor production process, vacuum pumps play a crucial role, with typical factories requiring a flow of 2000 to 8000 m³/h, and larger factories requiring more than 12000 m³/h. The vacuum level required in semiconductor manufacturing is between 100 and 400 mbar abs.
Understanding the Importance of Vacuum Pumps in Semiconductor Manufacturing
Vacuum pumps are essential in semiconductor manufacturing equipment, as they create the necessary low-pressure environment for various processes, such as:
- Single Crystal Furnace Equipment: Used for growing high-quality single crystal silicon ingots, which are the foundation of semiconductor devices.
- Vapor Phase Epitaxy Furnace Equipment: Employed for depositing thin, high-quality epitaxial layers on semiconductor wafers.
- Molecular Beam Epitaxy System: Utilized for growing high-quality, ultra-thin epitaxial layers with atomic-level precision.
- Oxidation Furnace (VDF): Responsible for growing high-quality oxide layers on semiconductor wafers.
- Low Pressure Chemical Vapor Deposition System (LPCVD): Used for depositing thin films, such as polysilicon, silicon nitride, and silicon dioxide, on semiconductor wafers.
- Ion Implanter (IBI): Employed for doping semiconductor materials with precise control over the depth and concentration of impurities.
- Probe Test Stand: Used for testing and characterizing semiconductor devices before packaging.
- Wafer Thinner: Responsible for thinning semiconductor wafers to the desired thickness.
- Wafer Dicing Machine (DS): Used for cutting semiconductor wafers into individual chips.
- Wire Bonder: Employed for connecting semiconductor chips to their packaging.
Vacuum Pump Technologies for Semiconductor Manufacturing
To meet the stringent requirements of semiconductor manufacturing, various vacuum pump technologies have been developed, each with its own advantages and applications. Some of the popular vacuum pump technologies used in the semiconductor industry include:
1. Oil-Sealed Rotary Screw Vacuum Pumps
Atlas Copco GHS VSD+ Oil-Sealed Rotary Screw Vacuum Pump
– Maintains consistent performance regardless of environmental conditions
– Equipped with Atlas Copco’s VSD+ technology, which automatically adjusts the pump speed to match the varying demand for vacuum
– Maintains the required vacuum set point with maximum efficiency
– Cuts energy consumption significantly, reducing environmental impact
2. Dry Claw Vacuum Pumps
Atlas Copco DZS VSD+ Dry Claw Vacuum Pump
– Offers lower lifecycle costs, higher performance, and less energy consumption
– Equipped with optimization, plug & play, digitalization, and mobile app features
– Ideal for smaller fab operations, direct replacements of existing pumps, or where lower acquisition cost matters more than total lifecycle cost
3. Liquid Ring Vacuum Pumps
Atlas Copco LRP VSD+ Liquid Ring Vacuum Pump
– Well-suited for smaller fab operations, direct replacements of existing pumps, or where lower acquisition cost matters more than total lifecycle cost
– Provides reliable and consistent vacuum performance
Vacuum Pump Placement and Contamination Control
In a house vacuum network, the air molecules travel in the direction of the vacuum pump, and at the designed vacuum level, the density of the flow is still considerable. This means that oil molecules and moisture cannot migrate towards the process. Vacuum pumps are often located far from the production halls in a dedicated utility room, which gives freedom to select the pump technology without worrying about hydrocarbon contamination of the network.
To ensure no contamination is added to the atmosphere, Atlas Copco vacuum pumps, such as the GHS VSD+ oil-sealed rotary screw vacuum pump range, are equipped with superior oil retention systems. If required, additional filtration systems can be fitted at the pump exhaust, and sophisticated air circulation/filtration systems can be installed surrounding the fab.
Semiconductor Industry Trends and Vacuum Pump Demand
The semiconductor industry has become a high-value-added and high-tech industry in the 21st century, surpassing the traditional steel and automobile industries. Semiconductors are the core of many industrial equipment and are widely used in core fields such as computers, consumer electronics, network communications, and automotive electronics.
As the semiconductor industry continues to grow and evolve, the demand for vacuum pumps in semiconductor manufacturing equipment is expected to increase. Manufacturers are constantly seeking ways to improve efficiency, reduce energy consumption, and ensure reliable vacuum supply, making advanced vacuum pump technologies like the ones offered by Atlas Copco increasingly important.
Conclusion
Vacuum pumps are a critical component in semiconductor manufacturing equipment, playing a vital role in creating the necessary low-pressure environment for various production processes. By understanding the different vacuum pump technologies, their applications, and the importance of proper placement and contamination control, semiconductor manufacturers can ensure the efficient and reliable operation of their production equipment, ultimately contributing to the continued growth and success of the semiconductor industry.
References:
– Atlas Copco Vacuum Solutions for Semiconductor Manufacturing
– Applied Materials Glossary
– Vacuum Equipment Used in Semiconductor Production
– Vacuum Pump Selection for Semiconductor Manufacturing
– Semiconductor Dry Vacuum Pump Market Size
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